Performances of Self-Aligned Top-Gate a-IGZO TFTs with Ultrathin PECVD SiO2 Gate Dielectric

Yuqing Zhang, Hao Peng, Haun Yang, Yunkai Cao, Ludong Qin, Haishi Fu, Lei Lu, and Shengdong Zhang

DOI

10.17023/enjp-te09

EDS

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Length: 01:23:45

01 Mar 2020

Tags:

shengdong zhang

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