Patterning Platinum by Selective Wet Etching of Sacrificial Pt-Al Alloy

S. Meier, H. Rinck, B. Lange, E. Muellner, R. Brederlow, M. Enzelberger-Heim, S. Summerfelt, F. Kreupl, B. Wolf

DOI

10.17023/gn1x-pn78

EDS

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Length: 00:31:35

01 Mar 2020

Tags:

m enzelberger heim

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