Physical Model for Rapid Thermal Annealing (RTA) Induced Mechanical Stress

Tingyou Lin and Jian Hsing Lee and Cheng Tsung Wu and Shao Chang Huang and Chung Chin Hung and Chauchin Su

DOI

10.17023/8hhm-ae08

EDS

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Length: 00:51:59

01 Mar 2020

Tags:

rapid thermal annealing

shao chang huang

induced mechanical stress

chung chin hung

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