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GaN on Si mm Wave RF Devices Integrated in a 200mm CMOS Compatible 3 Level Cu BEOL

B. Parvais, A. Alian, U. Peralagu, R. Rodriguez, S. Yadav, A. Khaled, R.Y. ElKashlan, V. Putcha, Sibaja-Hernandez, M. Zhao, P. Wambacq, N. Collaert, N. Waldron

DOI
10.17023/1cqp-3f46
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