A Fast Wafer Level Reliability (fWLR) Monitoring Concept as a Continuous Reliability Indicator for Wafer Mass Production

A. Martin, A. Mitchell, M. Traving, S. Wegner, A. Norman-Elvenich, H. Mayr, H. Nielen

DOI

10.17023/ndqv-cx81

EDS

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Length: 00:18:46

15 Dec 2020

Tags:

level reliability

continuous reliability

wafer mass production

norman elvenich

monitoring concept

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