A Reliability Enhanced 5 nm CMOS Technology Featuring 5th Generation FinFET with Fully Developed EUV and High Mobility Channel for Mobile SoC and High Performance COmputing Application
J.C. Liu, S. Mukhopadhyay, Amit Kundu, S. H. Chen, H.C. Wang, D.S. Huang, J. H. Lee, M. I. Wang, Ryan Lu, S.S. Lin, Y.M. Chen, H. L. Shang, P.W. Wang, H.C. Lin, Geoffrey Yeap, Jun He
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15 Dec 2020
