Skip to main content

Staggered Metallization with Air Gaps for Independently Tuned Interconnect Resistance and Capacitance

K.L. Lin, M. Anders, R. Bristol, M. Christenson, G. Elbaz, B. Holybee, H. Kaul, M. Kobrinsky, R. Krishnamurthy, M. Reshotko, H.J. Yoo

  • EDS
    Members: $5.00
    IEEE Members: $10.00
    Non-members: $20.00
    Length: 00:20:13

More Like This

  • IAS
    Members: $150.00
    IEEE Members: $250.00
    Non-members: $450.00
  • PES
    Members: Free
    IEEE Members: $45.00
    Non-members: $70.00
  • IAS
    Members: $150.00
    IEEE Members: $250.00
    Non-members: $450.00