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29 Sep 2022
ABSTRACT: This talk describes the development of acoustic inertial measurement sensors which comprises of wideband uni-directional accelerometer contact microphones with micro-gravity resolution and multi-axis resonator gyroscopes with self-calibration capabilities for use as acoustic auscultation devices in body-worn sensor arrays. Combining such devices into a multi-degree-of-freedom inertial measurement unit (IMU) on a single-chip enables the simultaneous measurement of pulmonary lung sounds, chest wall motion, heart mechano-acoustic signals, as well as of user body motion. The CMOS ASIC for the acoustic IMU consists of switched capacitor and transimpedance amplifier front-end circuits that utilize correlated double sampling and chopping for the dynamic cancellation of offset and flicker noise, and use charge injection calibration techniques to compensate for MEMS capacitor mismatch. For tuning and alignment of gyroscopic resonators, low-noise high-voltage (20V) charge pumps are implemented on-chip. We discuss the prospects of reducing power while maintaining precision in interface ICs for MEMS IMUs and review a few IoT applications of these devices.
BIO: Farrokh Ayazi is the Regents Entrepreneur and Ken Byers Professor in Microsystems in the School of Electrical and Computer Engineering at the Georgia Institute of Technology. He received the B.S. degree from the University of Tehran, in 1994, and the M.S. and Ph.D. degrees from the University of Michigan, Ann Arbor, in 1997 and 2000, respectively, all in electrical engineering. His main research interest is in the design of integrated Micro/Nano-Electro-Mechanical-Systems, with a focus on high-Q acoustic resonators and advanced inertial sensors. This has resulted in over 300 refereed publications, and 65 patents. He was the general chair of the 2014 IEEE Micro-Electro-Mechanical-Systems conference. Dr. Ayazi was the co-founder and CTO of Qualtr�, a spin-out of his research laboratory that commercialized bulk-acoustic-wave silicon gyroscopes for high precision applications, and which was acquired by Panasonic in 2016. He is the founder and managing director of StethX Microsystems, a second spin-off of his research lab that is developing next-generation wearable devices for long-term monitoring of cardio-pulmonary diseases using a proprietary microchip sensor technology. Dr. Ayazi is a fellow of IEEE.
BIO: Farrokh Ayazi is the Regents Entrepreneur and Ken Byers Professor in Microsystems in the School of Electrical and Computer Engineering at the Georgia Institute of Technology. He received the B.S. degree from the University of Tehran, in 1994, and the M.S. and Ph.D. degrees from the University of Michigan, Ann Arbor, in 1997 and 2000, respectively, all in electrical engineering. His main research interest is in the design of integrated Micro/Nano-Electro-Mechanical-Systems, with a focus on high-Q acoustic resonators and advanced inertial sensors. This has resulted in over 300 refereed publications, and 65 patents. He was the general chair of the 2014 IEEE Micro-Electro-Mechanical-Systems conference. Dr. Ayazi was the co-founder and CTO of Qualtr�, a spin-out of his research laboratory that commercialized bulk-acoustic-wave silicon gyroscopes for high precision applications, and which was acquired by Panasonic in 2016. He is the founder and managing director of StethX Microsystems, a second spin-off of his research lab that is developing next-generation wearable devices for long-term monitoring of cardio-pulmonary diseases using a proprietary microchip sensor technology. Dr. Ayazi is a fellow of IEEE.
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