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BEOL-Compatible Multiple Metal-Ferroelectric-Metal (n-MFM) FETs Designed for Low Voltage (2.5 V), High Density, and Excellent Reliability
15 Dec 2020

BEOL-Compatible Multiple Metal-Ferroelectric-Metal (n-MFM) FETs Designed for Low Voltage (2.5 V), High Density, and Excellent Reliability

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