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BEOL-Compatible Multiple Metal-Ferroelectric-Metal (n-MFM) FETs Designed for Low Voltage (2.5 V), High Density, and Excellent Reliability

Meng-Hui Yan, Ming-Hung Wu, Hsin-Hui Huang, Yu-Hao Chen, Yueh-Hua Chu, Tian-Li Wu, Po-Chun Yeh, Chih-Yao Wang, Yu-De Lin, Jian-Wei Su, Pei-Jer Tzeng, Shyh-Shyuan Sheu, Wei-Chung Lo, Chih-I Wu, Tuo-Hun Hou

DOI
10.17023/zy16-me65
  • EDS
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    Length: 00:19:14

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