3D Integration of Vertical Stacking of MoS2 and Si CMOS Featuring Embedded 2T1R Configuration Demonstrated on Full Wafers
Chun Jung Su, M.K. Huang, K.S. Lee, V.P.H. Hu, Y.F. Huang, B.C. Zheng, C.H. Yao, N.C. Lin, K.H. Kao, T.C. Hong, P.J. Sung, C.T. Wu, T.Y. Yu, K.L. Lin, Y.C. Tseng, C.L. Lin, Y.J. Lee, T.S. Chao, J.Y. Li, W.F. Wu, J. M. Shieh, Y.H. Wang, W.K. Yeh
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15 Dec 2020
